Fakultätskolloquium - Resonant Force Sensing for 0.1-µε, 10-kHz Strain Sensor

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Prof. B. E. Boser, Ph. D., University of Berkeley, California

Resonant Force Sensing for 0.1-µε, 10-kHz Strain Sensor

Date & Time: Monday, 26.03.2012, 14:00 s.t.

Location: Building 101, Seminar Room 02-016/18

Resonant force sensors have long been used in precision gyroscopes and balances. This presentation describes the design of such a device for strain measurements. Focus is on the optimization of resonator Q and amplitude for maximum dynamic range and resolution. A sustaining loop permitting oscillation in atmospheric pressure and with very large motional impedance and parasitics is described. The measured resolution of the device is 33-nε in a 10-kHz bandwith with only 200-μm gauge length. Spot noise is 40-pε/rt-Hz at 100-Hz.

Speaker Biography:

Bernhard Boser received the Diploma in Electrical Engineering from the Swiss Federal Institute of Technology in 1984 and the M.S. and Ph.D. from Stanford University in 1985 and 1988. From 1988 he was a Member of Technical Staff in the Adaptive Systems Department at AT&T Bell Laboratories. In 1992 he joined the faculty in the Department of Electrical Engineering and Computer Sciences at the University of California, Berkeley where he also serves as a co-Director of the Berkeley Sensor & Actuator Center and the UC Berkeley Swarm Lab.

Dr. Boser's research is in the area of analog and mixed signal circuits, with special emphasis on sensor and actuator interfaces. He and his co-workers accomplishments include differential capacitive readout techniques for MEMS accelerometers and gyroscopes, now used in the majority of commercial inertial sensors. The pioneering work on sigma- elta analog-digital converters, ultra-low power successive approximation converters, and digitally assisted analog circuits has stimulated research and products in mixed-signal integrated circuits. His paper “Training algorithm for optimal margin classifiers” published in 1992 by the ACM Workshop on Computational Learning Theory is the first description of the Support-Vector Algorithm, SVM, a classification technique that has become widely used in applications ranging from financial prediction to bioinformatics.

In 2004 Dr. Boser co-founded SiTime, a fabless mixed signal semiconductor company that offers MEMS-based silicon timing solutions replacing legacy quartz products. With 85% market share and over 35 million devices shipped, SiTime is the leader in this field and driving the $5 Billion timing market’s transition to silicon-based solutions. In 2005/06, Dr. Boser served as Chief Scientist and designed the company’s first MEMS oscillator circuit. He is presently an advisor to the company.

He has served on the program committees of the International Solid-State Circuits Conference, the Transducers Conference, the VLSI Symposium, and the Solid-State Sensor and Actuator Workshop. He has served the IEEE Solid-State Circuits Society as an Editor of the Journal of Solid-State Circuits, Chair of the Publications Committee, and in 2010 and 2011 was its President. In 2005/06 he was a visiting professor at the Swiss Federal Institute of Technology in Zurich, Switzerland. Dr. Boser is a Fellow of the IEEE.

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